Precision stress localization during mechanical harvesting of vertically oriented semiconductor micro- and nanostructure arrays

نویسندگان

  • M. M. Ombaba
  • L. V. Jayaraman
  • M. S. Islam
چکیده

Articles you may be interested in Microstructure factor and mechanical and electronic properties of hydrogenated amorphous and nanocrystalline silicon thin-films for microelectromechanical systems applications GaN epitaxial films grown by hydride vapor phase epitaxy on polycrystalline chemical vapor deposition diamond substrates using surface nanostructuring with TiN or anodic Al oxide Mechanism of nanodiamond film formation by stress relaxation on a preferentially oriented vertical basal plane graphitic precursor

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تاریخ انتشار 2014